日本EBARA/荏原超高真空涡轮分子泵体积小巧、节能，且一台设备可覆盖多种工艺
干式真空泵是一种不使用油或液体密封的非接触式真空泵。它们实现了干净的真空，没有水和油的回流或扩散。此外，无需定期维护，如加水或更换水或机油，操作非常简单。它是
半导体制造工艺和FPD/LED/太阳能电池制造过程中的泵，这些工艺强调清洁性。

产品型号：EMT1700MK
厂商性质：经销商
更新时间：2026-06-15
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EBARA在干式真空泵方面的优势

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1. Oil-free, clean vacuum
\r\n2. Can reach from atmospheric pressure to high vacuum
\r\n3. No need for regular maintenance such as refilling or replacing water or oil
\r\n"}}" id="text-3bbf437dbe" class="cmp-text" _mstvisible="10" style="box-sizing: inherit;">
无油、干净的真空
<div data-cmp-data-layer="{"text-3bbf437dbe":{"@type":"ebara/components/text","repo:modifyDate":"2025-04-28T03:12:28Z","xdm:text":"
1. Oil-free, clean vacuum
\r\n2. Can reach from atmospheric pressure to high vacuum
\r\n3. No need for regular maintenance such as refilling or replacing water or oil
\r\n"}}" id="text-3bbf437dbe" class="cmp-text" _mstvisible="10" style="box-sizing: inherit;">
可以从大气压到高真空

无需定期维护，如加水或更换机油

节能且紧凑的设计。令人安心的*支持和丰富的产品阵容

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Ebara's dry vacuum pumps are characterized by their energy efficiency and small size, and are used in various fields. The unique optimized rotor design has improved compression efficiency and achieved low power consumption. Due to its compact and lightweight design, it can be installed in limited spaces and is easy to relocate. We have shipped more than 200,000 units* worldwide, and are active in various fields, mainly in the semiconductor industry, where requirements for performance and reliability are strict.
\r\n
\r\nFurthermore, we have more than 50 service locations around the world and provide reliable global support. You can use the most suitable car from our extensive lineup, from compact and lightweight models with the highest standards in the industry, to hydrogen exhaust models, and high-load compatible models compatible with processes that generate reactive by-products.

\r\n

\r\n*As of September 2020

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Ebara干式真空泵以节能和小巧著称，广泛应用于多个领域。独特优化的旋翼设计提高了压缩效率，实现了低功耗。由于其紧凑轻便的设计，能够安装在有限的空间内，且易于搬迁。我们已向*出货超过20万台*，活跃于多个领域，主要集中在半导体行业，对性能和可靠性的要求非常严格。

干式真空泵是一种不使用油或液体密封的非接触式真空泵。它们实现了干净的真空，没有水和油的回流或扩散。此外，无需定期维护，如加水或更换水或机油，操作非常简单。它是
半导体制造工艺和FPD/LED/太阳能电池制造过程中
的泵，这些工艺强调清洁性。近年来，它们的应用范围扩大，因为它能够轻松、干净地从质谱仪和电子显微镜等分析仪中提取气体。此外，由于清洁的真空和便捷的维护，它们也被应用于真空干燥工艺和薄膜沉积工艺等多种领域。

日本荏原超高真空涡轮分子泵

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特色与优势

适用于从340到4,200升/分钟的广泛排气速度范围。提供集成控制器类型和风冷/水冷类型。

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EBARA在干式真空泵方面的优势

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